In this paper, The brand new lapping slurry and polishing slurry are introduced. Plus the deliquescence degree of CLBO is fallen to cheapest. A new Functioning technological know-how can also be adopted. Soon after rough polishing, the concentration of extremely-precision sprucing slurry is improved thoroughly. So does the extremely-precision polishing speed, along with the wiping pace is faster compared to deliquescence speed. The CLBO crystal surface area roughness can obtain 1nm and hold the surface area high quality nicely. Access as a result of your institution

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We summarized the current development position in the high-electric power DUV laser the two at the wavelength of FHG on the 1-μm laser and at 193 nm. The the latest enhancement on the strong-point out/fiber laser, together with the nonlinear optical crystals, prompts not merely the average electricity but also the beam excellent (coherence) from the DUV lasers to an unprecedented amount.

For instance, the current concave OC could get replaced by a airplane mirror which could mitigate the ability density about the surface area of M1 and also the diamond. Furthermore, working with substantial harm threshold coatings for M1 and diamond would also Increase the output ability with no damages. Then, the NIR laser within the 2nd Stokes wavelength may be high ample, as well as its very good beam quality, to crank out the final DUV laser at 193 nm using a substantial average energy.

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On the other side, the power scaling on the NIR laser is yet another aspect to enhance the normal electric power on the 193-nm DUV laser. Mainly because of the deficiency of the large-energy amplification Option in the NIR laser (for example at 1553 nm), nonlinear frequency procedures for example optical parameter oscillation (OPO) may very well be applied to develop a wavelength converter by shifting the wavelength from one μm to the specified wavelength and acquiring relative bigger electric power [21]. Not long ago, a diamond Raman laser confirmed its capacity in acquiring a large ability along with a superior conversion effectiveness in the 1st Stokes of the one-μm laser [22,23], which suggests the possibility to be used within the 193-nm DUV laser generation as a result of its substantial Raman get and huge frequency change.

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From the scientific and industrial programs, the beam excellent with the DUV laser is additionally an important parameter. Specifically, the beam quality on the DUV laser substantially impacts the laser machining success. The beam good quality in the DUV laser is decided by that of the elemental laser and also the crystal for the frequency conversion. Just lately, a higher-electrical power DUV laser (>ten W) at 258 nm was documented which has a beam high-quality of M2 < 1.5, which was produced by FHG of the Yb:YAG laser at 1030 nm using the CLBO crystal [13]. This laser would result in a much better laser machining consequence in comparison to the preceding DUV lasers with bigger M2.

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Cesium Lithium Borate (CsLiB6O10 or CLBO) is the best non-linear crystal which generates ultraviolet harmonics of the Nd:YAG basic laser wavelength. In an effort to greatly enhance the problems threshold, small CLBO area roughness, by ultra-precision machining, is necessary. As the CLBO crystal has quick hydroscopic response and micro scratches in machining, ultra-exact machining from the CLBO crystal is really a difficult complex problem.

The beam profile proven in Figure 7b shown an excellent beam quality as one of many deserves of Raman laser, which might be advantageous to create a 193-nm DUV laser with a high quality beam.

Its UV absorption edge reaches a hundred and eighty nm. The productive nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about two times as big as that of KDP. CLBO crystals might be grown from the stoichiometric soften with reduced viscosity.

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